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Vacuum Mean Gas Velocity Equations and Calculator
Fluids Systems Design and Engineering
Vacuum Mean Gas Velocity Equations and Calculator
The residency time of various gases in a system (or the time taken to remove various gases) relates to their individual mean velocity. The following table shows mean velocities for some gases. It can be seen that very light gases travel significant faster than heavy gases. It should be noted that Hydrogen and Helium do not pump efficiently in turbo pumps or cryopumps but heavy gases generally do.
u = [ ( 8 · R · T ) / ( π · M ) ](1/2)
Where:
M = Molar mass (kg/mol)
R = General gas constant = 8.314510 kJ/(kmol K),
T = Thermodynamic temperature (K),
u = Mean Velocity (m/s)
For example: Mean velocity of Argon @ 20°C
u = SQRT (8 x 8.31451 x 293 / 0.039948 x 3.1416)
u = 394 m/s
Gas
|
Molar Mass kg/mol
|
Mean Velocity m/s
|
Mach Number
|
Air
|
0.028966
|
463
|
1.4
|
Ar
|
0.039948
|
394
|
1.2
|
Cl2
|
0.0709
|
296
|
|
CO
|
0.028011
|
471
|
|
CO2
|
0.04401
|
376
|
1.1
|
H2
|
0.002016
|
1762
|
5.3
|
He
|
0.00402
|
1246
|
3.7
|
Kr
|
0.0838
|
272
|
|
N2
|
0.02801
|
471
|
1.4
|
Ne
|
0.020179
|
555
|
|
O2
|
0.03199
|
441
|
|
Xe
|
0.1313
|
217
|
|
H2O
|
0.01802
|
587
|
1.8
|
Mean velocity of gases at 20°C
The Vacuum Technology Book – Pfeiffer Vacuum September 2008